Loj hlob ib zaj duab xis translucent graphite ntawm ni thiab nws ob-txoj kev polymer-dawb hloov

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Nanoscale Graphite Films (Ngfs) yog robust nanomaterials uas tuaj yeem tsim tawm los ntawm kev hloov chaw ntawm kev hloov pauv thiab cov khoom siv morpor rau lawv siv hauv cov khoom siv tom ntej. Ntawm no peb qhia txog kev loj hlob ntawm ngf ntawm ob sab ntawm polycystalline Nickel ntawv ci (thaj tsam li ntawm 100 nm) thiab nws polymer-dawb (pem hauv ntej thiab rov qab mus txog 6 cm2). Vim tias cov morphology ntawm catalyst ntawv ci, ob cov duab pa roj teeb sib txawv hauv lawv lub cev thiab lwm yam ntxwv (xws li qhov muaj nuj nqis (xws li qhov muaj nuj nqis). Peb qhia tau tias ngfs nrog lub rougher backside tau zoo rau tsis muaj2 nrhiav kev ua haujlwm ntawm sab pem hauv ntej (2000 s / m2) tuaj yeem ua tau zoo nyob rau hauv. channel lossis electrode ntawm lub hnub ci cell (vim nws kis tau 62% ntawm pom lub teeb). Zuag qhia tag nrho, cov txheej txheem piav qhia kev loj hlob thiab thauj tau kom paub txog cov tshuaj carbon uas yog cov duab graphene thiab micron-tuab graphite zaj duab xis tsis haum.
Graphite yog ib cov khoom muaj dav siv. Tshwj xeeb, graphite muaj cov khoom ntawm cov hluav taws xob tsawg dua thiab muaj hluav taws xob siab, thiab muaj zog nyob rau hauv cov chaw ua phem thiab tshuaj ib puag ncig1,2. Fleake graphite yog ib tug zoo-paub pib cov khoom siv rau graphene virect3. Thaum ua tiav cov yeeb yaj kiab nyias, nws tuaj yeem siv rau hauv cov ntaub ntawv cua sov, suav nrog cov khoom siv hluav taws xob rau cov khoom siv hluav taws xob xws li cov khoom siv hluav taws xob xws li muaj hluav taws xob daws teeb meem. 12 Thiab cov yeeb yaj kiab rau lithography nyob rau hauv huab ultraviolet13,14, ua raws cov raws cov raws hnub ci hauv nruab nrab15,16. Rau tag nrho cov ntawv thov no, nws yuav yog qhov txiaj ntsig tseem ceeb yog tias thaj chaw loj ntawm cov yeeb yaj kiab graphite (ngfs) nrog kev tswj cov thickness) nrog kev tswj hwm tau yooj yim thiab thauj.
Graphite cov yeeb yaj kiab yog tsim los ntawm ntau txoj hauv kev. Nyob rau hauv ib kis, emosedding thiab nthuav dav ua raws los ntawm exfoliation tau siv los ua cov flakes clickene 10,11,17. Cov plaub ya yuav tsum tau ua ntxiv mus rau hauv cov yeeb yaj kiab ntawm qhov yuav tsum tau tuab, thiab nws feem ntau siv sijhawm ntau hnub los ua cov ntawv sau ntom ntom. Lwm txoj hauv kev yog pib nrog cov khoom siv ua ntej. Hauv kev lag luam, cov ntawv ntawm cov polymers yog carbonized (ntawm 1000-1500 ° C) thiab tom qab ntawd graphitized (ntawm 2800-3200 ° C) los ua cov ntaub ntawv fuse zoo. Txawm hais tias qhov zoo ntawm cov yeeb yaj kiab no siab, lub zog siv hluav taws xob yog qhov tseem ceeb ntawm kev siv hluav taws xob muaj tsawg kawg yog txwv tsawg kawg yog qhov tsawg kawg yog rau qee cov micron1,18,19,20.
Catalytic tshuaj vapor deposition (CVD) yog cov yeeb yaj kiab zoo nkauj rau kev tsim cov duab graphene (<10 nm) nrog tus nqi siab zoo thiab tsim nyog tus nqi21,24,25,26,27. However, compared with the growth of graphene and ultrathin graphite films28, large-area growth and/or application of NGF using CVD is even less explored11,13,29,30,31,32,33.
CVD-Grown Graphene thiab graphite cov yeeb yaj kiab feem ntau yuav tsum tau pauv mus rau kev ua haujlwm substrates34. Cov zaj duab xis nyias muaj kev cuam tshuam nrog ob txoj kev tseem ceeb35: (1) Tsis yog-etch Rauv Ultrict Kev Hloov Kho (Substrate Txhawb) 14,34,38. Txhua txoj kev muaj qee qhov zoo thiab qhov tsis zoo thiab yuav tsum raug xaiv thiab yuav tsum tau raug xaiv nyob ntawm qhov kev npaj, raws li tau piav rau lwm qhov chaw nyob qhov twg05,39. Rau graphene / graphite cov yeeb yaj kiab zus ntawm catalytic subtacate (ntawm uas polymethyl methacrylate (PMMAs feem ntau siv kev xaiv them nyiaj) yog feem ntau ntawm thawj qhov kev xaiv (PMMA Koj li al. Nws tau hais tias tsis muaj polymer tau siv rau hloov chaw (qauv loj li 4 cm2) 25,43, tab sis tsis muaj cov ntsiab lus hais txog cov qauv kev ruaj khov thiab / los yog tuav thaum hloov chaw; Cov txheej txheem ntub dej siv cov polymers muaj ntau ntau kauj ruam, suav nrog kev tshem tawm ntawm polymer li cas rau kev zam ntawm polymer txheej30,38,40,42. Tus txheej txheem no muaj qhov tsis zoo: piv txwv li, cov seem ntawm polymer muaj peev xwm hloov cov khoom ntawm cov neeg muaj hnub sib xyaw ua ke ntawm cov neeg ua yeeb yaj kiab ntawm cov neeg ua yeeb yaj kiab. Kev ua dua tshiab tuaj yeem tshem tawm cov neeg muaj zog ntxiv, tab sis cov kauj ruam ntxiv ntxiv nce tus nqi thiab lub sijhawm ntawm zaj duab xis Proreation38,40. Thaum lub CVD kev loj hlob, ib txheej ntawm graphene muab tso rau tsis yog tsuas yog nyob rau sab pem hauv ntej (sab ib sab ntawm lub ntsuas phoo catalyst), tab sis kuj nyob ntawm nws sab nraub qaum. Txawm li cas los xij, tom kawg tau txiav txim siab cov khoom pov tseg thiab tuaj yeem raug tshem tawm sai sai los ntawm cov ntshav ntshav38,41. Recycling cov yeeb yaj kiab no tuaj yeem pab ua kom ntsuas tau ntau, txawm tias nws yog qis dua zoo dua li lub ntsej muag carbon film.
Ntawm no, peb qhia txog kev npaj ntawm Wafer-Scale Bifacial kev loj hlob ntawm NGF nrog cov kev tsim zoo ntawm polycrystalline Nickel ntawv ci los ntawm CVD. Nws raug ntsuas yuav ua li cas cov roughness ntawm sab xub ntiag thiab nraub qaum ntawm cov ntawv ci cuam tshuam rau cov morphology thiab qauv ntawm NGF. Peb kuj qhia txog kev them nqi-ua tau zoo thiab ib puag ncig tus phooj ywg tshiab polymer-dawb hloov mus rau ob qho yeeb yaj kiab thiab qhia li cas pem hauv ntej cov yeeb yaj kiab yog haum rau ntau yam kev siv.
Cov ntu hauv qab no sib tham txog cov duab ua kom sib txawv ntawm cov khaub noom graphene (150), <10 txheej) thiab (iv) ngf (~ 300 txheej). Cov tom kawg yog cov tuab tuab tshaj plaws yog feem pua ​​ntawm thaj tsam (kwv yees li 97% thaj tsam ib 100 μm2) 30. Tias yog vim li cas cov zaj yeeb yaj kiab tag nrho tsuas yog hu ua NGF.
Polychtalline npib tsib xee cov ntawv siv rau cov khoom siv ntawm graphene thiab graphite thiab graphite cov zaj duab xis muaj cov khoom sib txawv raws li kev tsim khoom thiab ua tiav. Peb tsis ntev los no tau tshaj tawm txoj kev tshawb fawb kom ua kom tiav cov txheej txheem kev loj hlob ntawm NGF30. Peb qhia tias cov txheej txheem tsis zoo xws li Annealing sijhawm thiab chav ua haujlwm thaum lub sijhawm kev loj hlob ua cov ngfs ntawm cov khaub ncaws tuab. Ntawm no, peb txuas ntxiv tshawb xyuas kev loj hlob ntawm ngf ntawm polished pem hauv ntej (FS) thiab unpolished rov qab (daim ntawv ntawm Nickel ntawm 1a). Peb hom kev kuaj FS thiab BS tau tshuaj xyuas, teev nyob rau hauv NGF ntawm tus yam ntxwv ntawm Nickel Nyiaj Grey rau cov xim messing (Daim duab 1a); Cov ntsuas me me tau paub tseeb (Daim Duab 1b, c). Ib txwm Raman Spectrum ntawm FS-NGF pom nyob rau hauv thaj chaw kaj thiab qhia los ntawm liab, xim xiav thiab txiv kab ntxwv xiav hauv daim duab 1c. Cov yam ntxwv Raman Peaks ntawm Graphite G (1683 CM-1) thiab 2D (2696 CM-1) Paub meej tias txoj kev loj hlob ntawm cov Crystalline Ngf (Daim duab 1c, Rooj Si1). Thoob plaws ntawm zaj duab xis, ib qho kev ua ntej ntawm Raman spectra nrog kev siv piv (I2D / IG) ~ 0.3 tau pom, thaum Raman spectra nrog I2D / iG = 0.8 tau tsis tshua pom. Qhov qhaj ntawv tsis xws (d = 1350 cm-1) nyob rau hauv tag nrho cov yeeb yaj kiab qhia tau qhov zoo ntawm NGF kev loj hlob. Zoo sib xws Raman cov txiaj ntsig tau txais ntawm BS-NGF qauv (Daim duab Si1 A thiab B, Rooj SI1).
Kev sib piv ntawm Niag FS- thiab BS-NGF: (A) Duab ntawm cov chaw sib txawv ntawm cov qauv ntawm FS- thiab FS-NI magnification rau ntawm FS-NGF / NI, (E, G) SEM cov duab ntawm txawv magnifications teeb BS -GGF / NI. Cov xub xiav qhia pom Flg cheeb tsam, lub xub txwv kab ntxwv (ze ntawm Flg cheeb tsam (ze ntawm Fleet cheeb tsam (ze ntawm Fleet cheeb tsam (ze ntawm thaj av Flerg
Txij li thaum kev loj hlob yog nyob ntawm qhov tuab ntawm thawj zaug txheej txheem, siv lead ua loj, ua tiav kev tswj hwm tsim nyog, thiab cov kab ke tsim nyog; Txoj kev tshawb no siv cov ntsiab lus peb tau tshaj tawm. Txoj kev no ua rau thaj chaw kaj ntawm 0.1 txog 3% rau 100 μm230. Hauv cov ntu hauv qab no, peb nthuav tawm cov txiaj ntsig rau ob hom cheeb tsam. Siab siab cov duab qhia pom muaj ntau thaj chaw ci ntau ntawm ob sab (Daim duab 1F, g), qhia tias muaj flg thiab MLG thaj chaw30,45. Qhov no kuj tseem lees paub los ntawm Raman tawg (Daim duab 1c) thiab Tem cov txiaj ntsig (sib tham tom qab hauv ntu "FS-NGF: Cov Khoom"). Flg thiab MLG thaj chaw pom ntawm FS- NGF / Ni cov qauv (pem hauv ntej NI) yuav tau zus rau NI (111) formes tsim thaum lub sijhawm ua ntej-anneding22,30,45. Folding tau pom ntawm ob sab (Daim duab (Daim duab 1b, cim nrog cov xib xub liab). Cov quav no feem ntau pom nyob rau hauv cvd-grown graphene thiab graphite cov yeeb yaj kiab vim qhov loj tshaj plaws hauv kev nthuav dav ntawm graphite thiab lub npib tsib xee substrate30,38.
Tus AFM duab lees paub tias FS-NGF qauv tau hais lus yooj yim dua li BS-NGF qauv (duab SI1) (daim duab SI2). Lub hauv paus txhais tau square (rms) roughness muaj nuj nqis ntawm FS-NI (Daim Duab. SI2C) thiab 200 nm, feem (ntsuas dua li thaj tsam ntawm 20 € 20 μm2). Qhov siab dua roughness tuaj yeem nkag siab raws li kev soj ntsuam sab saum toj ntawm lub tsib xee (niar) ntawv ci hauv cov xeev (daim duab Si3). SEM cov duab ntawm FS thiab BS-Niar yog qhia nyob rau hauv cov nuj nqis Si3A-D, thiab Micron-me me kheej kheej kheej kheej, thaum cov ntawv luam tawm ntawm BS-NI NTAWV FOILEST TXAUS LOJ LOJ. raws li hais nrog lub zog siab. thiab poob. Tsawg thiab siab daws cov duab ntawm anealed Nickel ntawv ci (NIA) tau qhia hauv daim duab Si3e-h. Nyob rau hauv cov nuj nqis, peb tuaj yeem pom tau tias muaj ob peb micron-qhov me me hais ntawm ob sab ntawm Nickel ntawv ci (Daim duab Si3e-H). Cov nplej loj tuaj yeem muaj NI (111) kev taw qhia saum npoo av, raws li yav tas los tshaj tawm30,46. Muaj ntau qhov sib txawv hauv Nickel ntawv nyiaj morphology ntawm FS-NIA thiab BS-NIA. Qhov siab dua ntawm BS-NGF / NI yog vim tias tsis muaj qhov tsis muaj txiaj ntsig ntawm BS-niasis seem txawm tias tom qab annealing (daim duab si3). Hom kev sib txawv no ua ntej cov txheej txheem kev loj hlob tso cai rau cov ntxhib ntawm graphene thiab graphite zaj duab xis kom tswj tau. Nws yuav tsum tau sau tseg tias tus thawj substrate underwent underwent ib co grain reorganization thaum lub ntsej muag sib luag, uas txo me ntsis ntawv piv rau lub annealed ntawv sau thiab catalyst film22.
Cov khoom siv nplua-substrate sastness, annealing sijhawm (grain loj) 30,47 thiab txawm nm2 nplai (piv txwv li cov xim tuab (piv txwv li nanometers). Txhawm rau tswj qhov chaw ntawm lub substrate, cov hau kev xws li electrolytic polishing ntawm cov txiaj ntsig Nickel ntawv ci tuaj yeem suav tau tias [8. Cov peepreated nickel ntawv ci tuaj yeem yog annealed ntawm qis kub (<900 ° C) 46 thiab sijhawm (111) nplej (uas tau txais txiaj ntsig rau Fleg Kev Loj Hlob).
Slg thiab flg graphene tsis tuaj yeem tiv thaiv qhov nro ntawm cov kua qaub thiab dej, uas xav tau kev pab txhawb cov txheej txheem thaum lub sij hawm ntub dej hloov cov txheej txheem22,34,38. Hauv kev sib piv rau cov tshuaj ntub hloov ntawm polymer-txhawb nqa ib-txheej graphene38, peb pom tias ob tog Hloov chaw ntawm NGF rau ib qho kev muab tso rau hauv substrate pib nrog ntub etching ntawm qhov pib ni30.49 zaj duab xis. Lub Zown NGF / NI / NGF kuaj tau muab tso rau yav hmo ntuj hauv 150% hno3 diluted nrog 600 ml ntawm deionized (di) dej. Tom qab NI ntawv ci yog tag nrho cov lus, FS-NGF tseem tiaj thiab ib qho zoo li NGF / NI / NGF piv txwv, thaum BS-NGF yog raus hauv dej (Daim duab 2A, b). Tus rho tawm ngf tau tom qab ntawd pauv los ntawm ib beaker uas muaj cov dej ntws tshiab rau lwm tus beakerized thiab tus cais NGF tau ntxuav kom huv si, rov ua plaub mus txog rau lub sij hawm los ntawm lub ntsej muag ntxig. Thaum kawg, FS-NGF thiab BS-NGF tau muab tso rau ntawm qhov xav tau substrate (Daim duab 2C).
Polymer-dawb ntub tshuaj hloov cov txheej txheem rau ngf cog rau ntawm nolf tom qab ngf tom qab ngf tom qab ngf hloov mus rau opaque polymer substrate, (e) BS-NGF los ntawm tib qho qauv raws li Vaj Huam Sib Luag D (muab faib ua ob ntu), hloov pauv nyiaj kub (hloov pauv tau pob tshab substrate, cov npoo cim nrog liab fab).
Nco ntsoov tias SLG hloov ua siv cov txheej txheem kev hloov tshuaj ntub dej yuav tsum muaj lub sijhawm ua tiav ntawm 20-24 teev 38. Nrog rau cov txheej txheem polymer-dawb ua rau ntawm no (Daim duab Si4a), qhov tag nrho NGF hloov chaw ua haujlwm yog txo qis (kwv yees li 15 teev). Cov txheej txheem muaj: (Kauj Ruam 1) Npaj ib qho kev daws teeb meem thiab tso cov qauv hauv ni etching (~ 7200 feeb), (Kauj ruam 2) yaug nrog dej deionized (Kauj ruam - 3). Khaws rau hauv dej deionized lossis hloov mus rau hom phiaj substtrate (20 min). Dej daig ntawm NGF thiab qhov loj dua li ntawm cov ntaub ntawv dej (muaj kwv yees li 30 min), thiab thaum kawg cov qauv yog qhuav rau 10 min. Min nyob rau hauv lub nqus dej (10-1 MBAR) ntawm 50-90 ° C (60 feeb) 38.
Graphite yog paub los ua kom muaj dej thiab huab cua ntawm kev kub siab (≥ 200 ° C) 50,52. Peb ntsuas cov hnoos qeev siv Raman spectroscopy, sem, thiab xrd tom qab ntim dej kub thiab nyob rau txhua hnub los ntawm ob peb xyoos (daim duab SI4). Tsis muaj qhov tshwm sim tsis muaj kev cuam tshuam. Daim duab 2C qhia dawb-sawv FS-NGF thiab BS-NGF hauv dej de deionized. Peb tau ntes lawv ntawm Sio2 (300 nm) / Si Substrate, raws li qhia thaum pib ntawm daim duab 2C. Tsis tas li ntawd, raws li qhia hauv daim duab 2D, e, txuas ntxiv NGF tuaj yeem pauv mus rau ntau yam nkaus li alymer (thermabright polyamide los ntawm mi volve) thiab kub-coated carbon ntawv. Lub ntab FSCE-NGF tau yooj yim muab tso rau ntawm lub hom phiaj substrate (Daim duab 2C, d). Txawm li cas los xij, BS-NGF ua piv txwv loj dua 3 cm2 tau nyuaj los daws thaum muab raus dej rau hauv dej. Feem ntau, thaum lawv pib dov hauv dej, vim tias kev coj tsis ncaj lawv qee zaum ua rau ob lossis peb ntu (Daim duab 2E). Zuag qhia tag nrho, peb tau muaj peev xwm ua tiav Polymer-dawb hloov ntawm PS- thiab txuas ntxiv mus ntxiv hloov chaw tsis muaj NGP / NI / NGF kev loj hlob ntawm 6 thiab 3 CM2 hauv thaj chaw, feem. Ib qho ntxiv loj lossis cov ntawv me me tuaj yeem yog (yooj yim pom cov qauv ntawm cov qauv tooj liab (~ 1 mm 98-99% (tom qab kev loj hlob rau kev hloov pauv).
Hloov pauv cov qauv tsis muaj polymer tau txheeb xyuas kom meej. Cov yam ntxwv morphological morphological tau txais ntawm FS- NGF / Sio2 / Si (Daim Duab 2) siv cov qauv 3) thiab daim duab Sempees (OR) thiab FIG. Pom cov qauv kev puas tsuaj xws li cov kab nrib pleb, qhov, lossis chaw tsis mus kawm. Cov quav ntawm cov NGF (Daim duab 3B (Daim duab 3B, D, cim los ntawm cov xib-liab deb) tseem nyob hauv qab hloov. Ob FS- thiab BS-NGFs muaj ntawm Flg thaj tsam (kaj ntug tau qhia los ntawm cov xub xiav hauv daim duab 3). Kuj ceeb tias, nyob rau hauv sib piv rau ob peb thaj tsam puas feem ntau ua thaum muaj cov yeeb yaj kiab polymer hloov pauv hauv daim duab 3D) tau pauv yam tsis muaj kev tawg lossis tawg (daim duab 3D). 3). Cov. Kev sib raug zoo sib raug zoo tau lees paub ntxiv siv cov lej thiab sem duab ntawm NGF pauv mus rau hauv Lace-Carbon Tooj Liab GIDS, raws li tau tham txog tom qab ("FS-NGF: qauv"). Qhov hloov pauv BS-NGF / Sio2 / Si yog rougher dua FS-NMF / SIDS muaj nuj nqis ntawm 140 nm, raws li qhia tau hauv daim duab Si6A thiab B (20 × 20). Tus nqi RMS ntawm NGF pauv mus rau lub Sio2 / Si Substrate (RMS <2 NM) yog qhov qis dua (Xam tias qhov kev sib tw ntxiv yuav sib haum rau NI nto. Tsis tas li ntawd, AFM cov duab ua rau ntawm cov npoo ntawm fs- thiab bs-ngf / ngf / ngf / ngf thicknesses ntawm 100 thiab 80 nm, feem (Daim duab. Qhov me me tuab ntawm BS-NGF yuav yog qhov tshwm sim ntawm cov npoo tsis tau ncaj qha rau cov pa roj ua ntej.
Hloov NGF (Niag) tsis muaj polymer ntawm Sio2 / Si Wafer (Saib Daim Duab 2C): (ua kom muaj zog thiab siab rau lub ntsej muag kab ntxwv hauv lub vaj huam sib luag). Cov chaw ua haujlwm raug) - a). (C, D) SEM cov duab ntawm kev hloov pauv BS-NGF: Tsawg magnification (sib phim rau thaj chaw ib txwm pom los ntawm cov txiv kab ntxwv square hauv vaj huam sib luag square hauv vaj huam sib luag square hauv vaj huam sib luag square hauv vaj huam sib luag square hauv vaj huam sib luag square hauv vaj huam sib luag square hauv vaj huam sib luag square hauv vaj huam sib luag square hauv vaj huam sib luag square hauv vaj huam sib luag square hauv vaj huam sib luag square hauv vaj huam sib luag square hauv vaj huam sib luag (e, f) afm cov duab ntawm transpred fs- thiab bs-ngfs. Cov xub xiav no sawv cev rau Fleet cheeb tsam - ci ntsa iab, Cyan Arrow - Dub Sib Xws
Cov tshuaj lom neeg muaj pes tsawg leeg ntawm cov neeg loj thiab hloov chaw FS- thiab BS-NGFs tau txheeb xyuas los ntawm X-Ray Yees duab spectroscopy (XPS) (Daim duab 4). Qhov tsis muaj zog tau pom nyob rau hauv kev ntsuas ntsuas (Daim Duab 4A, sib raug rau NI sasttrate (850 ev) ntawm zus FS- thiab BS-NGFS (Niag). Tsis muaj lub siab nyob hauv qhov ntsuas ntsuas ntawm transped fs- thiab bs-ngf / sio2 / Si (Daim duab 4C; qhia tias tsis muaj qhov tsis muaj kev sib hloov. Cov nuj nqis 4D-f qhia cov kev daws teeb meem siab ntawm C 1 S, O 1 S thiab SI 2P zog ntawm FS-NGF / Sio2 / Si. Lub zog khi ntawm c 1 s ntawm graphite yog 284.4 ev53.54. Cov duab linear ntawm graphite peaks yog feem ntau suav hais tias yog asymmetrical, raws li qhia hauv daim duab 4d54. Lub siab-daws cov qhab nia ntawm C 1 S Spectrum (Daim duab 4D) kuj tseem pom zoo nkauj (piv txwv li, uas yog muaj raws li cov kev tshawb fawb yav dhau los38. Cov kab ntawm C 1 s spectra ntawm freshly Grown loj qauv (NIg) thiab tom qab hloov pauv yog 0.55 thiab 0.62 EV, feem. Cov txiaj ntsig no muaj siab dua cov ntawm cov SLG (0.49 ev rau slg on ib sio2 substrate) 38. Txawm li cas los xij, cov txiaj ntsig no yog me dua li yav tas los tshaj tawm kab ke rau cov qauv pyrolytic graphene CG thiab O A thiab av theem uas tsis muaj lub xub pwg nyom, tshem tawm qhov xav tau kom muaj kev daws teeb meem siab tshaj plaws Muaj → → π π π π π satellite ncov ncig ntawm 291.1 ear, uas feem ntau tau pom nyob hauv cov duab graphite. Qhov 103 EV thiab 532.5 EV cim hauv SI 2P thiab o 1 S Core Qaum Spectra (Saib Daim Duab "tau ntaus nqi mus rau Sio2 56 substrate, feem. XPS yog cov txheej txheem saum npoo av, yog li cov cim piav qhia rau ni thiab sio2 kuaj tau ua ntej thiab tom qab NGF hloov, ntsig txog kev tshwm sim los ntawm Flg cheeb tsam. Cov txiaj ntsig zoo sib xws tau pom rau kev hloov pauv BS-NGF kuaj (tsis muaj).
Nco ntsoov cov txiaj ntsig: (AC) Kev Ntsuam Xyuas Spectra ntawm cov khoom sib txawv ntawm cov lej FS-NI, BS-NGFRED FS-NGFRED FS-NGF / NGF / Sio2 / Si, feem. (D-F) Cov kev daws teeb meem siab ntawm cov tub ntxhais theem C 1 S, O 1s thiab Si 2P ntawm FS-NGF / Sio2 / Si coj mus kuaj.
Tag nrho cov khoom muaj zog ntawm kev pauv hloov muaj cov muaju tau soj ntsuam siv X-ray diffraction (XRD). Raug XRD qauv (Daim duab Si8) ntawm kev pauv hloov FS- thiab BS-NGF / Sio2 / Si) thiab (0 0 4) ntawm 26.6 ° thiab 54.7 °, zoo ib yam li graphite. Cov. Qhov no tshaj tawm cov siab siab crystalline zoo ntawm ngf thiab sib haum rau ib qho kev sib cuam tshuam ntawm d = 0.335 nm, uas yog tswj tau tom qab kauj ruam hloov mus. Qhov siv ntawm cov diffrraction ncov (0 0 2) yog kwv yees li 30 zaug uas yog qhov sib txawv ntawm NGF Crystal dav hlau yog zoo raws li cov qauv saum npoo.
Raws li cov txiaj ntsig ntawm kev teeb tsa ntawm SEM, XPS thiab XPR, qhov zoo tshaj ntawm FS-NI, txawm hais tias siab dua (SIVE) thiab SI7).
Slgs nrog polymer txhawb nqa khaubncaws sab nraud rau 200 nm tuab tuaj yeem ntab dej. Cov teeb tsa no yog siv feem ntau nyob rau hauv polymer-pab kev hloov tshuaj ntxuav cov txheej txheem ntub22,38. Graphene thiab graphite yog hydrophobic (ntub lub kaum 3.-90 °) 57. Lub zog hluav taws xob muaj peev xwm ntawm graphene ntawm ob qho tib si clickene thiab flg tau tshaj tawm tias yog tiaj tus, nrog cov peev xwm tsawg (~ 1 kj / mol) rau kev txav ntawm cov dej ntawm Square58. Txawm li cas los xij, cov kev suav nrog kev sib txuam nrog cov dej nrog graphene thiab peb txheej ntawm cov dej nrog NGF (txog 300 txheej) yog qis dua piv rau graphene. Qhov no yuav yog ib qho ntawm cov laj thawj yog vim li cas thiaj ua rau NGF tseem tiaj tiaj ntawm cov dej, thaum uas ntab hauv dej) curls thiab tawg. Thaum NGF yog raus hauv dej (cov txiaj ntsig yog tib yam rau ntxhib thiab tiaj tus ngf), nws cov npoo khoov (duab sab4). Nyob rau hauv cov ntaub ntawv ntawm ua tiav immersion, nws yog qhov xav tau tias NGF-kev cuam tshuam rau ob npaug ntawm NGF) thiab tias cov npoo ntawm NGF quav (hydrophobicity). Peb ntseeg tias cov tswv yim tuaj yeem tsim kho kom tsis txhob curling ntawm cov npoo ntawm embedded ngfs. Ib txoj hauv kev yog siv cov kuab tshuaj sib xyaw los daws cov tshuaj tiv thaiv ntub ntawm cov graphite Film59.
Kev hloov pauv ntawm SLG rau ntau hom ntawm cov substrates ntawm cov txheej txheem DUE DISTE cov txheej txheem tau raug tshaj tawm. Nws feem ntau tau txais uas tsis muaj zog van der waals rog muaj nyob ntawm graphene / silids cov yeeb yaj kiab thiab cov duab dhos ua si, ua kom zoo nkauj, cov ntaub ntawv sau ua ke, yog ib daim duab. Ntawm no peb xav tias kev sib cuam tshuam ntawm tib hom predominate. Peb tsis tau saib xyuas ib qho kev puas tsuaj lossis kev ua yeeb yam ntawm cov txheej txheem nthuav tawm ntawm no thaum lub sijhawm ua haujlwm sib xyaw (piv txwv li cov neeg siv khoom siv) (piv txwv li, Daim Duab 2, SI7 thiab Si7). Tsis tas li ntawd, peb tsis tau saib ib lub ncov siab Sic hauv XPS C 1 s spectrum ntawm theem tseem ceeb ntawm NGF / Sio2 / Si qauv (Daim duab (Daim duab 4). Cov txiaj ntsig tau qhia tias tsis muaj kev sib tw ntawm NGF thiab lub hom phiaj substrate.
Hauv seem yav dhau los, "Polymer-dawb hloov ntawm FS- NGF," Peb pom tau tias NGF tuaj yeem loj hlob thiab hloov chaw ntawm Nickel ntawv ci. Cov FS-NGFS thiab BS-NGFS tsis zoo ib yam ntawm kev sib tw ntawm qhov chaw ntawm sab nraud, uas tau qhia peb kom peb tau tsim cov ntawv tsim nyog tshaj plaws rau txhua hom.
Xav txog qhov pob tshab thiab smoother nto ntawm FS-NGF, peb kawm nws cov qauv hauv zos, kho qhov muag thiab cov hluav taws xob hauv kev nthuav dav ntxiv. Tus qauv thiab qauv ntawm FS-NGF yam tsis muaj kev hloov polymer Cov kev coj ua tau pom nyob hauv daim duab 5. Tsawg tshaj tawm cov qauv kev xav tau pom muaj cov yam ntxwv sib txawv, piv txwv li thaj chaw tsaus thiab thaj chaw (Daim duab 5A). Cov yeeb yaj kiab tag nrho cov khoom ua kom muaj kev ntseeg siab thiab kev ruaj khov ntawm cov cheeb tsam sib txawv Tshwj xeeb, nyob rau hauv Daim duab 5d qhia cov qauv Choj ntawm nws feem loj tshaj plaws (txoj hauj lwm cim los ntawm daim duab peb sab thiab muaj cov duab graphene nrog ib qho dav ntawm 51. Cov muaj pes tsawg leeg nrog kev sib kis ntawm 0.33 ± 0.01 nm yog ntxiv txo mus rau ob peb kab ntawm thaj chaw nqaim (kawg ntawm cov tawv dub stow hauv daim duab 5 d).
Ntiaj teb DEM duab ntawm cov duab polymer-free Cov xub ntsuab nyob rau hauv Panels A thiab C Teem npe ncig thaj chaw ntawm kev puas tsuaj thaum lub nqaj sib ncab. (F-i) nyob rau hauv panels a rau c, sau qauv hauv cov cheeb tsam sib txawv yog qhia los ntawm xiav, cyan, txiv kab ntxwv, thiab cov voj voog liab, feem ntau.
Tus Ribbon qauv hauv Daim Duab 5C qhia (cim nrog cov kev taw qhia liab) qhov kev taw qhia ntawm daim duab 5c) vim tias muaj ntau dhau ntawm cov khib nyiab txiav txim siab30,61,62. Nyob rau hauv cov kev daws teeb meem siab, cov nanofolds 30 nthuav tawm ib qho txawv crystallographic kev taw qhia dua li tus so ntawm NGP cheeb tsam; Cov teeb meem ntawm cov teeb meem ntawm cov kab ke ntawm lub ntsej muag yog taw qhia yuav luag ntsug, ntau dua li tav toj (inset hauv daim duab 5c). Ib yam li ntawd, Flug cheeb tsam qee zaus ua haujlwm raws linear thiab nqaim band Lub inset hauv daim duab 5E lees paub tias muaj ob-thiab peb-txheej graphene txheej hauv flg sector (interpplanar nrug 0.33 ± 0.01 nm), uas yog nyob rau hauv kev pom zoo nrog peb cov txiaj ntsig yav dhau los. Tsis tas li ntawd, kaw SY daim duab ntawm Polymer-dawb NGF pauv mus rau tooj liab cov yeeb yaj kiab nrog Lac-saib ntsuas ntsuas Si) yog qhia hauv daim duab Si9. Qhov zoo tshem tawm flg cheeb tsam (cim nrog cov xub xiav) thiab thaj av tawg hauv daim duab Si9F. Lub xub xiav (ntawm ntug kev pauv hloov NGF) yog txhob txwm qhia tau tias Flg cheeb tsam tuaj yeem tiv thaiv cov txheej txheem hloov chaw tsis muaj polymer. Hauv cov ntsiab lus, cov duab no paub tseeb NGF (suav nrog Flg cheeb tsam (suav nrog SLG cheeb tsam) tswj hwm kom nruj kev ncaj ncees thaum lub sij hawm tem thiab SEM si9).
Vim tias cov tiaj tiaj zoo tshaj plaws ntawm NGF (saib Daim Duab 5A), nws tsis yog qhov nyuaj rau Orient cov flakes raws [0001] Domain Axis los soj ntsuam cov qauv sau. Ua raws li cov hauv zos tuab ntawm zaj duab xis thiab nws qhov chaw nyob, ntau thaj tsam ntawm kev txaus siab (12 cov ntsiab lus) tau txheeb xyuas rau cov kev tshawb fawb hluav taws xob. Nyob rau hauv cov duab 5A-C, plaub ntawm cov cheeb tsam no tau qhia thiab cim nrog cov voj voos (xiav, txiv kab ntxwv, thiab cim liab). Daim duab 2 thiab 3 rau sau hom. Cov nuj nqis 5F thiab g tau txais los ntawm Flg cheeb tsam pom nyob rau hauv Daim duab 5 thiab 5. Raws li qhia hauv cov duab 5B thiab C, feem. Lawv muaj cov qauv hexagonal zoo ib yam li cov duab graphene63. Tshwj xeeb, Daim duab 5F qhia tau peb tus txheej txheem superimosed nrog tib qho kev taw qhia, tig mus rau ntawm 10 ° thiab 20 ° thiab muaj txiaj ntsig los ntawm cov neeg sib piv ntawm peb khub (10-10) reflections. Zoo sib xws, Daim duab 5G qhia ob lub superimosed hexagonal qauv tig los ntawm 20 °. Ob pawg lossis peb pab pawg ntawm cov qauv hexagonal nyob hauv thaj av Flg tuaj yeem tshwm sim los ntawm peb lub dav hlau lossis sab nraud ntawm-dav hlau graphene txheej 33 tig ib leeg rau ib leeg. Hauv kev sib piv, lub tshuab hluav taws xob txawv hauv daim duab 5A, Kuv (sib piv nrog cov qauv NGP hauv daim duab 5A) qhia tag nrho cov khoom siv ntau dua li cov khoom siv ntau dua. Cov qauv sau no sib haum rau cov qauv thicker thiab flarmed ntawm cov khoom siv ntawm ob lossis peb lub superimposed graphite (lossis graphene) crystallites. Dab tsi yog tshwj xeeb tshaj plaws hauv Flg cheeb tsam yog tias lub crystallites muaj qee qib ntawm-dav hlau lossis tawm ntawm-dav hlau Misorientation. Graphite hais / txheej nrog nyob rau hauv-dav hlau sib xeem kaum ob °, 22 °, 22 ° tau tshaj tawm rau NGF loj hlob rau NI 64 zaj duab xis. Kev sib hloov lub qhov tseem ceeb pom nyob rau hauv txoj kev tshawb fawb no ua raws nraim nrog yav dhau los pom cov ces kaum sib hloov (°) rau twisted blg63 graphene.
Cov khoom hluav taws xob ntawm NGF / Sio2 / Si tau ntsuas ntawm 300 k tshaj thaj tsam ntawm 10 × 3 MM2. Cov txiaj ntsig ntawm electron cov cab kuj, kev mus ncig yog 1.6 × 1020 cm2 v-1 cm2 v-1 thiab 2000 s-cm-1, feem. Lub zog thiab kev coj muaj txiaj ntsig ntawm peb cov NGF zoo ib yam li kev ua vaj huam sib luag Cov tshuab hluav taws xob tau pom zoo muaj txiaj ntsig yog ob qho kev txiav txim siab tshaj qhov uas tau hais tawm (7.25 × 10 cm-tuab ntawm lub siab (3200 ° c) polyimide cov ntaub ntawv 20.
Peb kuj tau ua UV-pom kev hloov pauv kev ntsuas ntawm FS-NGF pauv mus rau Quartz substrates (Daim Duab 6). Lub txiaj ntsig spectrum pom tias yuav luag pauv kev hloov pauv tas li 62% nyob rau hauv ntau yam 350-800 nm, qhia tias NGF yog translucent rau pom lub teeb. Qhov tseeb, lub npe "Kaust" tuaj yeem pom hauv cov duab digital ntawm cov qauv hauv daim duab 6B. Txawm hais tias nanocrystalline qauv ntawm NGF sib txawv ntawm cov quav, tus naj npawb ntawm cov khaubncaws sab nraud, cov naj npawb ntawm cov kav ntawm 2.3% kis tau ploj rau ib qho txheej ntxiv ntawm txheej ntxiv. Raws li cov kev sib raug zoo no, tus naj npawb ntawm cov duab graphene nrog 38% kev sib kis no yog 21. Tus neeg loj hlob ntawm 300 Graphe txheej, piv txwv li 1, SI5 thiab SI7). Yog li ntawd, peb xav tias qhov pom tseeb Optical Transparency sib raug rau Flg thiab MLG thaj tsam, vim tias lawv tau faib thoob plaws zaj duab xis (figs. 1, 3 thiab 6c). Ntxiv rau cov ntaub ntawv saum toj no, conductival thiab transparency kuj tau lees tias lub siab crystalline zoo ntawm kev pauv hloov NGF.
(a) UV-Pom kev hloov pauv tau, (b) raug NGF hloov rau ntawm Quartz siv cov neeg sawv cev. (c) Schematic ntawm NGF (tsaus lub thawv) nrog tusyees faib flg thiab MLG cov qauv cim thoob plaws tus qauv (saib daim duab 1) (kwv yees li 0.1-3% thaj tsam ib 100 μm2). Tus qauv random thiab lawv qhov ntau thiab tsawg nyob rau hauv daim duab yog rau cov lus piv txwv nkaus xwb thiab tsis sib haum rau cov chaw tiag.
Txhais tau NGF Grown los ntawm CVD tau dhau los pauv mus rau liab qab Silicon chaw thiab siv nyob rau hnub ci hlwb15,16. Lub zog hluav taws xob hloov hluav taws xob hloov kho (PCce) yog 1.5%. Cov ngfs ua ntau lub zog xws li cov kev nquag sib xyaw ua ke, them cov hluav taws xob, thiab pob tshab hluav taws xob )15,16. Txawm li cas los xij, daim duab zaj duab xis tsis zoo li qub. Cov kev ua kom zoo dua yog qhov tsim nyog los ntawm kev ua tib zoo tswj cov ntawv sau ua ke, vim tias ob lub zog txuas ntxiv hauv kev txiav txim siab PCE tus nqi ntawm lub hnub ci Cell 15,16. Feem ntau, cov yeeb yaj kiab graphene yog 97.7% pob tshab rau pom lub teeb, tab sis muaj ib daim ntawv tiv, tab sis muaj Ohms / sq.16. Qhov saum npoo tsis kam ntawm graphene cov yeeb yaj kiab tuaj yeem raug txo los ntawm kev nce tus lej (ntau yam hloov ntawm graphene txheej) thiab doping nrog hno3 (~ 30 ohm / sq.) 66. Txawm li cas los xij, txoj kev siv no siv sijhawm ntev thiab sib txawv hloov cov khaubncaws sab nraud povtseg tsis yog ib txwm muaj kev sib cuag zoo. Peb sab pem hauv ntej ngf muaj cov khoom xws li kev ua tau zoo 2000 s / cm, zaj duab xis daim ntawv tiv taus 50 Ohm / sq. thiab 62% pob tshab, ua nws cov kev xaiv uas muaj txiaj ntsig rau cov kev coj ua raws li lossis cov hluav taws xob hauv nruab hnub ci hauv nruab hnub ntawm cov yeeb yaj kiab [SOLAR.
Txawm hais tias cov qauv thiab cov kev siv tawm sab nraud ntawm BS-NGF zoo sib xws rau FS-NGF, nws roughness yog txawv ("kev loj hlob ntawm fs- thiab bs-ngf"). Sij hawm dhau los, peb siv Ultra-nyias zaj duab xis Graphite22 raws li cov roj sensor. Yog li ntawd, peb sim qhov ua tau zoo ntawm kev siv BS-NGF rau roj kev hnov ​​cov haujlwm (Daim duab Si10). Ua ntej, MM2-qhov loj me ntawm BS-NGF tau pauv mus rau hauv Interdigitating Classor Sensor Chip (Daim duab Si10a-c). Cov ntsiab lus tsim ntawm cov nti tau tshaj tawm; Nws thaj chaw rhiab yog 9 MM267. Hauv cov duab sonic (Daim duab Si10B thiab c), lub hauv paus kub electrode pom meej meej los ntawm NGF. Ib zaug ntxiv, nws tuaj yeem pom tias cov kev pab them nuj nqis no tau ua tiav rau txhua qhov qauv. Cov pa roj sensor ntawm ntau cov roj av tau sau tseg (Daim duab SI10D) (Daim duab SI11) thiab cov txiaj ntsig kev teb tau qhia hauv Figs. SI1G. Yuav muaj lwm yam roj cuam tshuam nrog rau SO2 (200 ppm), h2 (2%), ch4 (200 ppm), h2s (200 ppm). Ib qho yuav ua rau muaj tsis muaj2. Electrophilic xwm ntawm Gas22,68. Thaum adsorbed nyob rau sab ntawm graphene, nws txo qhov kev nqus ntawm cov tshuab hluav taws xob tam sim no los ntawm lub system. Ib qho kev sib piv ntawm lub sijhawm teb cov ntaub ntawv ntawm BS-NGF sensor nrog yav dhau los luam tawm cov sensors tau nthuav tawm hauv Rooj Si2. Lub tshuab rau kev rov kho NGF sensors siv UV ntshav lossis thermal lossis thermal lossis thermal lossis thermal (50-150 °going
Thaum lub sijhawm CVD CVD, Graphene kev loj hlob tshwm sim ntawm ob sab ntawm catalyst Substrate41. Txawm li cas los xij, BS-graphene feem ntau yog muab tshem tawm thaum lub sijhawm hloov pauv41. Hauv txoj kev tshawb no, peb ua qhia pom tias qhov kev loj hlob zoo NGF loj thiab polymer-dawb NGF tuaj yeem ua tiav ntawm ob sab kev txhawb nqa. BS-NGF yog thinner (~ 80 nm) dua FS-NGF (~ 100 nm), thiab qhov sib txawv), thiab qhov sib txawv no tau piav qhia ncaj qha rau cov pa roj ua ntej. Peb tseem pom tias qhov ntxhib ntawm niar substrate cuam tshuam qhov roughness ntawm NGF. Cov txiaj ntsig tau qhia tias Grownar FS-NGF tuaj yeem siv ua cov khoom siv ua ntej rau cov duab graphene (los ntawm exfoliation vethocce) lossis raws li cov channel ua haujlwm hauv lub solar hlwb15,16. Nyob rau hauv kev sib piv, BS-NGF yuav siv rau kev nrhiav roj (Daim duab Si9) thiab tej zaum yuav tsum muaj lub zog cia lub nruab nrog tes tshiab71,72 qhov twg nws txoj kev npau taws saum npoo av yuav pab tau.
Xav txog cov saum toj no, nws muaj txiaj ntsig zoo los ua ke txoj haujlwm tam sim no nrog yav dhau los luam tawm graphite cov yeeb yaj duab zus los ntawm CVD thiab siv Nickel ntawv ci. Raws li tuaj yeem pom hauv Table 2, qhov siab tshaj qhov siab peb tau siv luv luv lub sijhawm tiv thaiv (theem kev loj hlob) txawm tias muaj ntau ntawm 850 ° C). Peb kuj ua tiav kev loj hlob ntau dua li niaj zaus, qhia tau lub peev xwm rau kev nthuav dav. Muaj lwm yam los txiav txim siab, qee qhov peb tau muaj nyob hauv lub rooj.
Ob-sided siab zoo NGF tau loj hlob ntawm Nickel ntawv nyiaj los ntawm catalytic cvd. Los ntawm kev tshem tawm cov polymer tsoos polymer (xws li cov neeg siv hauv CvD graphene), peb ua tiav huv thiab tsis muaj zog ntawm Nickel ntawv ci) rau ntau yam txheej txheem-twv txiaj ntsig. Tshwj xeeb, NGF suav nrog FlG thiab MLG thaj tsam (feem ntau 0.1% rau 3% rau hauv 100 μm2) uas yog kev ua yeeb yam zoo rau hauv cov ntawv zaj duab thicker. Cov phiaj xwm DOOM qhia tau tias cov cheeb tsam no yog tsim los ntawm ob mus rau peb graphite / graphene hais (muaju), ib co uas muaj kev sib dhos ntawm 10-20 °. Flg thiab MLG thaj tsam yog lub luag haujlwm rau cov pob tshab ntawm FS-NGF kom pom lub teeb. Raws li rau cov nplooj ntawv tom qab, lawv tuaj yeem nqa mus sib txuas mus rau sab pem hauv ntej thiab, raws li qhia tau tias, tuaj yeem muaj lub hom phiaj ua haujlwm (piv txwv, rau kev kuaj mob roj). Cov kev tshawb fawb no yog qhov tseem ceeb rau kev txo cov khib nyiab thiab cov nqi hauv cov txheej txheem kev lag luam CVD cov txheej txheem.
Feem ntau, qhov nruab nrab thickness ntawm cvd ngf lus dag ntawm (qis- thiab ntau-txheej) graphene thiab kev lag luam (micrometer) graphitions. Qhov ntau ntawm lawv cov khoom kom nthuav, ua ke nrog cov duab yooj yim uas tsim nyog tsim nyog rau kev siv hluav taws xob ntawm cov txheej txheem tam sim no tam sim no siv.
Ib 25-μm-tuab nickel ntawv ci (99.5% purity, tus zoo purity, tus neeg siab dawb huv) tau muab ntsia rau hauv kev lag luam CVD reactor (AIXtron 4-nti BMPro). Lub system tau ntxuav nrog Argon thiab tau tshem tawm mus rau ib puag lub zog ntawm 10-3 MBAR. Tom qab ntawd nickel ntawv ci tau muab tso rau. Hauv AR / H2 (tom qab ua ntej tshaj tawm Ni NTAWV
Qhov qauv morphology ntawm cov qauv tau pom los ntawm sem siv ZEIN siv FEINS Merlin tsom (1 kV, 50 PA). Tus piv txwv ntawm nplaim roughness thiab ngf thickness tau ntsuas siv AFM (qhov ntev icon icon spm, bruker). TEM thiab saed kev ntsuas yog nqa tawm siv FEI Titan 80-300 Cubed MemeScister Hwj Huam Sib Deg (300 kv) Spatial daws teeb meem 0.09 nm. NGF kuaj tau pauv mus rau cov pa roj carbon lacy coated tooj liab rau tiaj tus yees thiab saig qauv tsom. Yog li, feem ntau ntawm cov qauv flocs raug tshem tawm hauv cov hws ntawm kev txhawb nqa daim nyias nyias. Hloov NGF kuaj tau txheeb xyuas los ntawm XRD. Cov duab xoo hluav taws xob tau muab cov hmoov loj sib txawv
Ob peb Raman taw tes ntsuas tau raug kaw cia siv lub tshuab tsom (alpha 300 ra, witec). Ib tug 532 nm laser nrog lub zog ua kom zoo (25%) tau siv los tiv thaiv cov teebmeem. X-Ray Yees duab spectroscopy (xps) tau ua rau thaj tsam ntawm 300 €306.66.6.6.6.6.6.6.6.6.6.6.66.6.666 EV thiab 20 EV thiab 20 EV, feem. NGF kuaj xyuas mus rau Sio2 tau txiav rau hauv daim (3 × 10 ytglium hu rau hauv 30 w. Kev Thauj Hluav Taws Xob thiab Cov Kev Ntsuas Hluav Taws Xob tau ua raws cov qauv ntawm 300 k thiab lub zog sib txawv ntawm cov khoom siv lub cev (PPMS sib txawv Kev hloov UV-VI ceev tau sau cia siv LAMBDA 950 UV-Vis Spectrophotometer nyob rau hauv 350-800 ng ngf ntau yam kev hloov pauv mus rau quartz substrates thiab quartz siv cov qauv.
Cov tshuaj tsis kam Sensor (interdigitated elects spip) tau wired mus rau ib qho kev cai luam tawm cov txiag hluav taws xob pib. Cov ntawv luam tawm hluav taws xob uas cov cuab yeej siv tau nyob nrog kev sib tiv tauj cov khoom lag luam ntawm 1 v nrog screen mus rau cov roj txuas ntxiv thiab tom qab ntawd ntxuav tawm dua. Lub chamber tau ntxuav los ntawm kev ntxuav tawm nrog nitrogen ntawm 200 CM3 rau 1 teev los xyuas kom meej kev tshem tawm ntawm txhua qhov kev ntsuas, suav nrog noo noo. Tus neeg tsom xam tib neeg tau maj mam tso tawm mus rau hauv chav ntawm tib tus nqi txaus ntawm 200 CM3 los ntawm kaw lub n2 kheej kheej.
Cov hloov kho tshiab ntawm tsab xov xwm no tau tshaj tawm thiab tuaj yeem nkag mus los ntawm qhov txuas ntawm cov kab lus tshaj tawm.
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Cheng Ky, xim av PW thiab Cahill DG thermal conductivity ntawm graphite cov yeeb yaj kiab zus rau ni (111) los ntawm tsawg-ntsuas tshuaj vapor deposition. adverb. Matt. Interface 3, 16 (2016).
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